Direct writing of Cu-based micropatterns inside Cu2O nanosphere films using green femtosecond laser reductive sintering
Direct writing of Cu-based micropatterns inside Cu2O nanosphere films using green femtosecond laser reductive sintering
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DOI：
10.1364/ome.401676
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发表时间：
2020-10
影响因子：
2.8
通讯作者：
M. Mizoshiri;Atsushi Tanokuchi
中科院分区：
文献类型：
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作者：
M. Mizoshiri;Atsushi Tanokuchi
采用绿色飞秒激光脉冲诱导还原烧结法在Cu 2 O纳米球薄膜内部制备了Cu基微图形。由Cu 2 O纳米球、聚乙烯吡咯烷酮和2-丙醇组成的Cu 2 O纳米球膜的线性和非线性吸收系数分别为0.062 × 104 /cm和10−50 cm/GW。最小线宽与激光光斑直径相同（≤ 0.7 µm），表明金属化的热扩散可忽略不计。通过改变焦点沿着z轴的位置，将激光脉冲聚焦在薄膜上，然后扫描，形成具有不同高度的Cu基微图案。这种技术被应用于三维微细加工。
Cu-based micropatterns were fabricated using reductive sintering inside Cu2O nanosphere films induced by green femtosecond laser pulses. The linear and nonlinear absorption coefficients of Cu2O nanosphere films composed of Cu2O nanospheres, polyvinylpyrrolidone, and 2-propanol were 0.062 × 104 /cm and 10−50 cm/GW, respectively. The minimum line width was the same as the laser spot diameter (∼0.7 µm), indicating negligible thermal diffusion for metallization. Cu-based micropatterns with different heights were formed by varying the position of the focal spot along the z-axis by focusing the laser pulses on the films and then scanning. This technique is applied to three-dimensional microfabrication.