Investigation of the effect of temperature and stress gradients on accelerated EM test for Cu narrow interconnects

Investigation of the effect of temperature and stress gradients on accelerated EM test for Cu narrow interconnects
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DOI:
10.1016/j.tsf.2005.09.101
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发表时间:
2006-05
期刊:
影响因子:
2.1
通讯作者:
C. Tan;A. Roy
C. Tan;A. Roy
中科院分区:
材料科学3区
文献类型:
--
作者:
C. Tan;A. Roy

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