Atomic-Resolution Topographic Imaging of Crystal Surfaces
Atomic-Resolution Topographic Imaging of Crystal Surfaces
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DOI：
10.1021/acsnano.1c02907
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发表时间：
2021-05-13
期刊：
影响因子：
17.1
通讯作者：
Ikuhara, Yuichi
中科院分区：
文献类型：
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作者：
Ishikawa, Ryo;Tanaka, Riku;Ikuhara, Yuichi
金属氧化物的表面具有重要的技术意义，并广泛用作各种电子和化学应用的基材。然而，真实的表面并不是完全清晰且干净的表面，而是包含多种原子缺陷。在这里，我们展示了通过使用原子分辨率环形暗场扫描透射电子显微镜 (ADF STEM) 的深度切片直接测定 SrTiO3 (001) 的 3D 表面原子结构，包括终止层和原子缺陷，如空位、吸附原子、凸缘、扭结及其复杂组合。为了克服 STEM 中较差的深度分辨率，我们使用贝叶斯框架拟合算法对 ADF STEM 图像的逐列深度剖面进行统计分析，并在 1518 个单独原子柱的入口表面实现了 +/- 0.9 埃的深度分辨率。当前的表面原子分辨率 3D 电子显微镜将为表面科学提供肥沃的土壤。
The surface of metal oxides is of technological importance and is extensively used as a substrate for various electronic and chemical applications. A real surface, however, is not a perfectly well-defined and clean surface, but rather contains a diverse class of atomistic defects. Here, we show the direct determination of the 3D surface atomic structure of SrTiO3 (001) including termination layers and atomistic defects such as vacancies, adatoms, ledges, kinks, and their complex combinations, by using depth sectioning of atomic-resolution annular dark-field scanning transmission electron microscopy (ADF STEM). To overcome the poor depth resolution in STEM, we statistically analyze the column by column depth profiles of ADF STEM images with a Bayesian framework fitting algorithm, and we achieve depth resolution at the entrance surface of +/- 0.9 angstrom for 1518 individual atomic columns. The present atomic-resolution 3D electron microscopy at the surface will provide fertile ground especially in surface science.