Stable microwave coaxial cavity plasma system at atmospheric pressure.
Stable microwave coaxial cavity plasma system at atmospheric pressure.
复制标题
大气压下稳定的微波同轴腔等离子体系统。
DOI：
10.1063/1.2918980
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发表时间：
2008
期刊：
影响因子：
--
通讯作者：
Jin Joo Choi
中科院分区：
文献类型：
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作者：
H. Song;Jungmi Hong;Kun;Jin Joo Choi
我们提出了一个新的大气微波等离子体系统的材料加工的压力范围高达760 ℃和微波输入功率高达6千瓦的发展进行了系统的研究。采用TM（011）腔模的圆柱谐振腔，可靠地产生和维持了大气压微波等离子体。应用时变有限元麦克斯韦方程求解器对微波腔体进行了优化设计。方位孔被放置在腔体和施加器之间的最大磁场位置处，以使在2.45 GHz的谐振频率下进入微波等离子体的耦合效率最大化。该系统由磁控管电源、环行器、定向耦合器、三抽头调谐器、虚负载、同轴谐振腔和中心谐振腔组成。本文讨论了在不同的气压和微波输入功率范围内，对不同类型的气体进行谐振结构的设计和构造，以及利用光学实验对大气等离子体进行诊断。
We present a systematic study of the development of a novel atmospheric microwave plasma system for material processing in the pressure range up to 760 torr and the microwave input power up to 6 kW. Atmospheric microwave plasma was reliably produced and sustained by using a cylindrical resonator with the TM(011) cavity mode. The applicator and the microwave cavity, which is a cylindrical resonator, are carefully designed and optimized with the time dependent finite element Maxwell equation solver. The azimuthal apertures are placed at the maximum magnetic field positions between the cavity and the applicator to maximize the coupling efficiency into the microwave plasma at a resonant frequency of 2.45 GHz. The system consists of a magnetron power supply, a circulator, a directional coupler, a three-stub tuner, a dummy load, a coaxial cavity, and a central cavity. Design and construction of the resonant structures and diagnostics of atmospheric plasma using optical experiments are discussed in various ranges of pressure and microwave input power for different types of gases.