Highly accurate imaging based position measurement using holographic point replication
Highly accurate imaging based position measurement using holographic point replication
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DOI：
10.1016/j.measurement.2020.108852
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发表时间：
2021-01-08
期刊：
影响因子：
5.6
通讯作者：
Sawodny, Oliver
中科院分区：
文献类型：
--
作者：
Hartlieb, Simon;Tscherpel, Michael;Sawodny, Oliver
提出了一种基于高精度成像的立体测量装置的实验方法，其总测量体积为140 mm x 100 mm x 50 mm。该系统可以在100 mm x 75 mm x 24 mm的校准体积中检测多个目标点（LED）的位置，精度为sigma（x）= 0.367 μ m，sigma（y）= 0.373 μ m和sigma（z）= 0.437 μ m。这种高精度是通过全息复制每个点光源到相机传感器上的点的预定义图案（簇）并平均所有点的中心位置来实现的。我们提出了一个详细的描述的原则，过程和校准结果，包括变形补偿和稳定性测量，以及二维和三维轨迹测量的结果。为了验证测量设置的性能和精度，采用干涉仪作为参考传感器。距离D = 277 μ m的二维轨迹的剩余误差为σ（d）= 0.242 μ m，距离D = 57.2 mm的三维轨迹的剩余误差为σ（d）= 0.674 μ m。
The experimental approach of a highly accurate imaging based stereo measurement setup with a total measurement volume of 140 mm x 100 mm x 50 mm is presented. The system can detect the position of multiple target points (LEDs) in a calibrated volume of 100 mm x 75 mm x 24 mm with an accuracy of sigma(x) = 0.367 mu m, sigma(y) = 0.373 mu m and sigma(z) = 0.437 mu m. This high accuracy is reached by holographically replicating each point light source to a predefined pattern (cluster) of spots on the camera sensor and averaging the center positions of all spots. We present a detailed description of the principle, the process and results of calibration including deformation compensation and stability measurements, as well as the results of two- and three-dimensional trajectory measurements. To validate the performance and accuracy of the measurement setup, interferometers are employed as reference sensors. The residual error of a two-dimensional trajectory of distance D = 277 mu m is sigma(d) = 0.242 mu m and for a three-dimensional trajectory of distance D = 57.2 mm it is sigma(d) = 0.674 mu m.