Touchpoint-Tailored Ultrasensitive Piezoresistive Pressure Sensors with a Broad Dynamic Response Range and Low Detection Limit
Touchpoint-Tailored Ultrasensitive Piezoresistive Pressure Sensors with a Broad Dynamic Response Range and Low Detection Limit
复制标题
接触点定制的超灵敏压阻压力传感器，具有宽动态响应范围和低检测限
DOI：
10.1021/acsami.8b20284
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发表时间：
2019-01-16
影响因子：
9.5
通讯作者：
Yang, Chunlei
中科院分区：
文献类型：
--
作者：
Chen, Ming;Li, Kun;Yang, Chunlei
可穿戴式压力传感器具有高灵敏度、宽动态响应范围和低检测下限等特点，在电子皮肤和软机器人领域具有广泛的应用前景。在这项工作中，我们报道了一种基于微结构聚二甲基硅氧烷(PDMS)/银和粗糙聚酰亚胺/Au叉指电极的高性能耐磨压力传感器。通过定制接触点，所得到的压力传感器具有超高的灵敏度(在259.32-2.5kPa范围内)、宽的动态响应范围(0-54kPa)、快速的响应(类似于200m S)和低的检测下限(0.36pa)。此外，还系统地研究了不同的传感器结构、PDMS几何特征和银层厚度对压力传感器性能的影响。由于这些优点，制作的压力传感器能够实时监测脉搏波，并可以作为机械手的人造皮肤来检测微弱的压力变化，在生物医学、实时健康监测和智能机器人领域具有巨大的应用前景。
Wearable pressure sensors with high sensitivity, broad dynamic response range, and low detection limit are highly desirable to enable the applications in electronic skins and soft robotics. In this work, we report a high-performance wearable pressure sensor based on microstructured polydimethylsiloxane (PDMS)/Ag and rough polyimide/Au interdigital electrodes. By tailoring the touchpoints, the resulting pressure sensors show ultrahigh sensitivity (259.32 kPa(-1) in the range of 0-2.5 kPa), broad dynamic response range (0-54 kPa), fast response (similar to 200 mu s), and low detection limit (0.36 Pa). Furthermore, the effect of different sensor structural configurations, PDMS geometrical feature, and Ag thickness on the performance of the pressure sensors are systematically investigated. Thanks to these merits, the fabricated pressure sensor is capable of real-time monitoring pulse wave and can act as artificial skin for robot hand to detect weak pressure changes, leading to the great application promise in the fields of biomedical, real-time health monitoring, and intelligent robot.