Highly sensitive AFM using self-excited weakly coupled cantilevers
Highly sensitive AFM using self-excited weakly coupled cantilevers
复制标题
DOI：
10.1063/1.5115836
复制
发表时间：
2019-09
影响因子：
4
通讯作者：
Y. Lin;H. Yabuno;X. Liu;Y. Yamamoto;Sohei Matsumoto
中科院分区：
文献类型：
--
作者：
Y. Lin;H. Yabuno;X. Liu;Y. Yamamoto;Sohei Matsumoto
在这篇文章中，我们提出了一种方法，使用弱耦合杠杆，提高原子力显微镜（AFM）的灵敏度的几个数量级。有两种主要的动力学AFM方法，即，振幅调制AFM和频率调制AFM（FM-AFM）。在基于单悬臂梁本征频率偏移的FM-AFM中，由于制造工艺中小型化的限制，灵敏度的提高受到限制。相比之下，我们使用基于本征模位移的耦合双稳杠杆，其对应于双稳杠杆之间的振幅比。这使我们能够通过降低杠杆之间的耦合刚度来提高灵敏度，而无需依赖于进一步的小型化。此外，为了检测本征模位移，即使在高粘度环境中，我们通过反馈控制在弱耦合杠杆中产生自激。利用这种宏观尺度耦合杠杆的原型系统，在模拟原子力的磁力作用下，我们证实了所提出的方法的高灵敏度。在本文中，我们提出了一种方法，使用弱耦合杠杆，提高原子力显微镜（AFM）的灵敏度几个数量级。有两种主要的动力学AFM方法，即，振幅调制AFM和频率调制AFM（FM-AFM）。在基于单悬臂梁本征频率偏移的FM-AFM中，由于制造工艺中小型化的限制，灵敏度的提高受到限制。相比之下，我们使用基于本征模位移的耦合双稳杠杆，其对应于双稳杠杆之间的振幅比。这使我们能够通过降低杠杆之间的耦合刚度来提高灵敏度，而无需依赖于进一步的小型化。此外，为了检测本征模位移，即使在高粘度环境中，我们通过反馈控制在弱耦合杠杆中产生自激。利用这个原型系统的耦合宏观杠杆受到的磁力，这…
In this article, we propose a method, using weakly coupled cantilevers, to enhance the sensitivity of atomic force microscopy (AFM) by several orders of magnitudes. There are two major dynamics AFM methods, i.e., amplitude modulation AFM and frequency modulation AFM (FM-AFM). In FM-AFM, which is based on the eigenfrequency shift of a single cantilever, the enhancement in sensitivity is restricted because of the limitations of miniaturization in the manufacturing process. By contrast, we used coupled cantilevers based on the eigenmode shift, which corresponds to the amplitude ratio between the cantilevers. This enabled us to increase the sensitivity by reducing the coupling stiffness between cantilevers without relying on further miniaturization. In addition, to detect the eigenmode shift, even in high-viscosity environments, we produced self-excitation in the weakly coupled cantilevers by feedback control. Using this prototype system of coupled macroscale cantilevers subjected to the magnetic force, which simulates the atomic force, we confirmed the high sensitivity of the proposed method.In this article, we propose a method, using weakly coupled cantilevers, to enhance the sensitivity of atomic force microscopy (AFM) by several orders of magnitudes. There are two major dynamics AFM methods, i.e., amplitude modulation AFM and frequency modulation AFM (FM-AFM). In FM-AFM, which is based on the eigenfrequency shift of a single cantilever, the enhancement in sensitivity is restricted because of the limitations of miniaturization in the manufacturing process. By contrast, we used coupled cantilevers based on the eigenmode shift, which corresponds to the amplitude ratio between the cantilevers. This enabled us to increase the sensitivity by reducing the coupling stiffness between cantilevers without relying on further miniaturization. In addition, to detect the eigenmode shift, even in high-viscosity environments, we produced self-excitation in the weakly coupled cantilevers by feedback control. Using this prototype system of coupled macroscale cantilevers subjected to the magnetic force, which...