Plasmonic Color Sheet with Al Nano Periodic Structure Formed by Transfer Technique
Plasmonic Color Sheet with Al Nano Periodic Structure Formed by Transfer Technique
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DOI：
10.1109/omn.2019.8925133
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发表时间：
2019-07
期刊：
影响因子：
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通讯作者：
H. Kumagai;I. Takahashi;S. Takeoka;K. Sawada;T. Fujie;Kazuhiro Takahashi
中科院分区：
文献类型：
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作者：
H. Kumagai;I. Takahashi;S. Takeoka;K. Sawada;T. Fujie;Kazuhiro Takahashi
本文研究了聚苯乙烯-聚丁二烯-聚苯乙烯(SBS)三嵌段共聚物(膜厚250 nm)与聚乙烯醇(PVA)牺牲层的转移过程，在可伸缩弹性体纳米片上形成的等离子Al纳米结构，提供了38%的高弹性应变。在独立的SBS纳米片上成功地制备了Al亚微米结构，而利用SBS纳米片制备的问题是光刻过程中的低化学电阻以及电子束或聚焦离子束引起的充电。部署在SBS纳米片上的Al亚波长光栅显示了基于表面等离子体激发的光学低透射率的互补反射滤色器。
This paper deals with plasmonic Al nanostructures on a stretchable elastomer nanosheet using polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer with a film thickness of 250 nm by a transfer process with a poly(vinyl alcohol) (PVA) sacrificial layer, which provides high elastic strain of 38%. The Al submicron structures were successfully fabricated on the freestanding SBS nanosheet while the problems in fabrication using SBS nanosheet were low chemical resistance at photolithography process and the charging-up induced by electron beam or focused ion beam. The Al subwavelength gratings deployed on the SBS nanosheet demonstrated complementary reflective color filter based on optical low transmission by excitation of surface plasmons.