Durability Evaluation of Antireflection Structure Replica Mold using High Hardness and Antifouling UV-curable Resin
Durability Evaluation of Antireflection Structure Replica Mold using High Hardness and Antifouling UV-curable Resin
复制标题
高硬度防污紫外光固化树脂减反射结构复制模的耐久性评价
DOI:
10.2494/photopolymer.32.143
复制
发表时间:
2019
影响因子:
0.8
通讯作者:
J. Taniguchi
中科院分区:
文献类型:
--
作者:
Junya Kawauchi;S. Hiwasa;J. Taniguchi
Moth-eye-structure replica mold was fabricated from a glassy carbon master mold by UVNIL. New UV curable resin with high hardness and antifouling property was used. The motheye-structure was duplicated from the replica mold by use conventional UV curable resin for UV-NIL. Compared with the replica mold by use of a conventional release-agent-free UV curable resin, the moth-eye-structure of new replica mold had superior imprint durability. The reflectance of the imprinted film was below 1% for the 350th imprint. It was that the antifouling property was very important for prolonging life time of replica mold.