Development of a metal-tip cantilever for noncontact atomic force microscopy
Development of a metal-tip cantilever for noncontact atomic force microscopy
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DOI：
10.1063/1.1865812
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发表时间：
2005-03-01
影响因子：
1.6
通讯作者：
Hasegawa, Y
中科院分区：
文献类型：
--
作者：
Akiyama, K;Eguchi, T;Hasegawa, Y
我们报告了用于非接触原子力显微镜 (AFM) 的金属尖端悬臂的聚焦离子束制造，并通过观察 Si(111)7x7 表面的原子分辨 AFM 图像证明了其优越的性能。通过透射电子显微镜对尖端顶点进行表征表明，尖端半径小于 5 nm。由于金属尖端的附着而引起的悬臂谐振频率和 Q 因子的有害变化很小，并且不会影响 AFM 成像的性能。由于该制造技术适用于任何材料，因此可以用这种方法开发各种功能探针。 (C) 2005 年美国物理研究所。
We report on a focused-ion-beam fabrication of a metal-tip cantilever for noncontact atomic force microscopy (AFM) and demonstrate its superior performance by observing atomically resolved AFM images of the Si(111)7x7 surface. Characterization of the tip apex by transmission electron microscope revealed that the tip radius is less than 5 nm. Detrimental changes in the resonance frequency and the Q factor of the cantilever due to the attachment of the metal tip are small and do not affect the performance of the AFM imaging. Since the fabrication technique is applicable to any materials, various functional probes can be developed with this method. (C) 2005 American Institute of Physics.