High temperature-induced crystallization in tantalum pentoxide layers and its influence on the electrical properties

High temperature-induced crystallization in tantalum pentoxide layers and its influence on the electrical properties
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五氧化二钽层的高温诱导结晶及其对电性能的影响

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发表时间:
2003
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通讯作者:
G. Vitali
G. Vitali
中科院分区:
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文献类型:
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作者:
E. Atanassova;M. Kalitzova;G. Zollo;A. Paskaleva;A. Peeva;M. Georgieva;G. Vitali

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