Development of a scanning nanopipette probe microscope for fine processing using atmospheric pressure plasma jet
Development of a scanning nanopipette probe microscope for fine processing using atmospheric pressure plasma jet
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DOI：
10.7567/jjap.55.08nb15
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发表时间：
2016-08-01
影响因子：
1.5
通讯作者：
Iwata, Futoshi
中科院分区：
文献类型：
--
作者：
Morimatsu, Daisuke;Sugimoto, Hiromitsu;Iwata, Futoshi
我们开发了一种新的基于局域大气压等离子体射流(APPJ)的精细材料加工技术，该技术使用配备有纳米管的扫描探针显微镜。使用纳米管--口径为亚微米的锥形玻璃毛细管--作为喷嘴，可以定位APPJ的放电区，以便进行精细的表面处理。该纳米管还可以用作具有剪切力反馈控制的扫描探针显微镜的探头，该扫描探针显微镜能够将吸管边缘定位在材料表面附近，用于APPJ加工和加工表面的成像。成功地在光致抗蚀剂薄膜上加工了亚微米级的孔和线图案。可以通过改变施加的脉冲电压和吸管与表面之间的距离来控制处理图案的大小。(C)2016日本应用物理学会
We developed a novel technique for fine material processing based on a localized atmospheric-pressure plasma jet (APPJ) using a scanning probe microscope equipped with a nanopipette. Using a nanopipette-a tapered glass capillary with an aperture of sub-micrometer diameter-as a nozzle makes it possible to localize the discharge area of the APPJ for fine surface processing. The nanopipette can also be used as a probe for a scanning probe microscope operated with shear-force feedback control, which is capable of positioning the pipette edge in the vicinity of material surfaces for APPJ processing and imaging of the processed surface. Sub-micrometer holes and line patterns were successfully processed on a photoresist film. It was possible to control the size of the processed patterns by varying the applied pulse voltage and the distance between the pipette and the surface. (C) 2016 The Japan Society of Applied Physics