Smart sensing using custom photo-application-specific integrated circuits and charge-coupled device technology
Smart sensing using custom photo-application-specific integrated circuits and charge-coupled device technology
复制标题
使用定制的照片专用集成电路和电荷耦合器件技术进行智能传感
DOI：
10.1117/12.200595
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发表时间：
1995
影响因子：
1.3
通讯作者：
K. Engelhardt
中科院分区：
文献类型：
--
作者：
P. Seitz;T. Spirig;O. Vietze;K. Engelhardt
现代半导体技术使得制造光传感器成为可能，其几何形状和功能适合各种光学测量技术的特定传感任务。几个这样的智能传感器，通过商用实现
CMOS/CCD 工艺已在不同的光学传感应用中得到成功证明：(1) 具有 10 nm 分辨率和 50 nm 差分精度的新型绝对位置编码器，(2) 像素大小和形状可以实时变化的动态 CCD 图像传感器，(3) 能够在片上和曝光期间执行任意内核大小卷积的图像传感器，以及 (4) 用于以下应用的 2-D 同步检测器/解调器（“锁定 CCD”）外差干涉测量和飞行时间（激光雷达）深度成像。其中一些设备和技术依赖于动态实时时钟方案，为此开发了通用智能传感器控制器，能够以高达 25 MHz 的时钟速率控制和驱动几乎所有现有的 CCD/CMOS 图像传感器。定制光电传感器和成像仪的设计和制造设施的可用性，即使在原型数量上也可以快速且相当便宜地生产，为各种传统和新颖的光学测量技术开辟了新的可能性。
Modern semiconductor technologies make it possible to fabricate photosensors whose geometry and functionality are adapted to specific sensing tasks of various optical measurement techniques. Several such smart sensors, realized with commercially available
CMOS/CCD processes, have been demonstrated successfully in different optical sensing applications: (1) a novel absolute position encoder with 10-nm resolution and 50-nm differential accuracy, (2) a dynamic CCD image sensor whose pixel size and shape can be varied in real time, (3) an image sensor capable of carrying out convolutions with arbitrary kernel sizes on-chip and during the exposure, and (4) a 2-D, synchronous detector/demodulator ("lock-in CCD") for applications in heterodyne interferometry and time-of-flight (laser-radar) depth imaging. Several of these devices and techniques rely on dynamic, real-time clocking schemes, for which a universal smart sensor controller was developed, capable of controlling and driving almost any existing CCD/CMOS image sensor at clock rates of up to 25 MHz. The availability of design and fabrication facilities for custom photosensors and imagers, produced quickly and quite inexpensively even in prototype quantities, opens up new possibilities for a wide range of traditional and novel optical measurement techniques.