Design of a Gain Scheduled PID Controller for the Precision Stage in Lithography
Design of a Gain Scheduled PID Controller for the Precision Stage in Lithography
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DOI：
10.1007/s12541-011-0132-6
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发表时间：
2011-12-01
影响因子：
1.9
通讯作者：
Kim, Jung-Han
中科院分区：
文献类型：
--
作者：
Kim, Mun-Su;Kim, Jung-Han
针对光刻过程中的精确定位阶段，提出了一种基于均方根信号的PID增益调度控制器。阶段调节中的低摄动是一个非常重要的问题，它对光刻工艺的质量有着重要的影响。调节控制中的扰动也被称为阶跃猎取，通常当系统的控制带宽减小时，阶跃猎取有减小的趋势。然而，在这种情况下，控制系统将非常弱的小干扰，如电气噪声，甚至是结构振动，其中的舞台安装在建筑物。本文提出了一种利用实时RMS变换器芯片的增益调度控制方案，以最大限度地减少级寻猎，同时最大限度地提高抗干扰能力。为了验证所提出的控制方案，设计了一个气浮式精密工作台并进行了实验。利用MATLAB进行仿真，对舞台和控制器进行建模和分析。仿真和实验结果验证了所提控制方案与传统PID控制器在精密定位阶段的有效性。
This paper presents a novel PID gain scheduling controller using a root mean square (RMS) signal for the precise positioning stage in lithography process. Low perturbation in stage regulation is a very important issue and it significantly affects the quality of the lithography process. Perturbation in regulation control is also referred as stage hunting, and usually the stage hunting has a tendency to be decreased if the control bandwidth of the system is reduced. However, in this case the control system will be very weak against small disturbances such as electrical noise or even structural vibration of the building in which the stage is installed. In this paper, a gain scheduling control scheme using a real-time RMS converter chip is proposed to minimize stage hunting and simultaneously maximize immunity to disturbances. For the test of the proposed control scheme, an air levitated precision stage was designed and used for experiments. Simulations were conducted by MATLAB to model and analyze the stage and controller. The simulation and experimental results are presented to verify the effectiveness of the proposed control scheme for the precision positioning stage, as compared with a conventional PID controller.