Oblique powder blasting for three-dimensional micromachining of brittle materials
Oblique powder blasting for three-dimensional micromachining of brittle materials
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DOI：
10.1016/s0924-4247(01)00572-6
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发表时间：
2001-08-01
影响因子：
4.6
通讯作者：
Gijs, MAM
中科院分区：
文献类型：
--
作者：
Belloy, E;Sayah, A;Gijs, MAM
我们提出倾斜粉末喷砂作为脆性材料的三维微加工技术。粉末喷砂是一种微加工工艺，基于使用含有侵蚀性Al2O3颗粒的加压空气束。通过改变入射粒子到被掩模覆盖的衬底的入射角，可以利用微图案化孔的倾斜斜率和掩模欠蚀刻现象来产生三维微结构化的新选择。我们已经确定和量化的二次反弹粒子在掩模欠蚀刻的作用。(C)2001 Elsevier Science B.V.保留所有权利。
We present oblique powder blasting as a three-dimensional micromachining technology for brittle materials. Powder blasting is a microfabrication process, based on the use of a pressurised air beam containing eroding Al2O3 particles. By varying the angle of incidence of the incoming particles to a substrate, covered by a mask, one can exploit the oblique slopes of micropatterned holes and mask underetching phenomena to generate new options for three-dimensional microstructuring. We have identified and quantified the role of secondary rebounding particles in mask underetching. (C) 2001 Elsevier Science B.V. All rights reserved.