A Small Range Six-Axis Accelerometer Designed with High Sensitivity DCB Elastic Element.
A Small Range Six-Axis Accelerometer Designed with High Sensitivity DCB Elastic Element.
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采用高灵敏度DCB弹性元件设计的小量程六轴加速度计
DOI：
10.3390/s16091552
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发表时间：
2016-09-21
期刊：
影响因子：
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通讯作者：
Zheng Y
中科院分区：
文献类型：
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作者：
Sun Z;Liu J;Yu C;Zheng Y
本文介绍了一种采用高灵敏度双悬臂梁弹性元件的小量程六轴加速度计(测量范围为±g)。该传感器是基于并联机构研制的，可靠性高。传感器的灵敏度特性影响着传感器的精度。为了提高灵敏度，采用了DCB结构作为弹性单元。通过动力学分析，利用拉格朗日方程建立了加速度计的动力学模型，通过偏导数计算和守恒同余变换分别得到了加速度计的质量矩阵和刚度矩阵。通过对加速度计结构的简化，建立了加速度计的自由振动模型，并根据该模型设计了传感器的参数。通过对DCB结构的刚度分析，计算了梁的挠度曲线。与有限元分析结果相比，最大挠度沿x轴的符合率为89.0%，沿y轴的符合率为88.3%，沿z轴的符合率为87.5%。通过对DCB弹性单元的应变分析，得到梁的灵敏度。实验结果表明，理论分析的准确率x轴为90.4%，y轴为74.9%，z轴为78.9%。实验中线加速度Ax、Ay和Az的测量误差分别为2.6%、0.6%和1.31%。实验证明，采用DCB弹性元件的加速度计具有很高的灵敏度和精度。
This paper describes a small range six-axis accelerometer (the measurement range of the sensor is ±g) with high sensitivity DCB (Double Cantilever Beam) elastic element. This sensor is developed based on a parallel mechanism because of the reliability. The accuracy of sensors is affected by its sensitivity characteristics. To improve the sensitivity, a DCB structure is applied as the elastic element. Through dynamic analysis, the dynamic model of the accelerometer is established using the Lagrange equation, and the mass matrix and stiffness matrix are obtained by a partial derivative calculation and a conservative congruence transformation, respectively. By simplifying the structure of the accelerometer, a model of the free vibration is achieved, and the parameters of the sensor are designed based on the model. Through stiffness analysis of the DCB structure, the deflection curve of the beam is calculated. Compared with the result obtained using a finite element analysis simulation in ANSYS Workbench, the coincidence rate of the maximum deflection is 89.0% along the x-axis, 88.3% along the y-axis and 87.5% along the z-axis. Through strain analysis of the DCB elastic element, the sensitivity of the beam is obtained. According to the experimental result, the accuracy of the theoretical analysis is found to be 90.4% along the x-axis, 74.9% along the y-axis and 78.9% along the z-axis. The measurement errors of linear accelerations ax, ay and az in the experiments are 2.6%, 0.6% and 1.31%, respectively. The experiments prove that accelerometer with DCB elastic element performs great sensitive and precision characteristics.