Fabrication of (K,Na)NbO3 Lead‐Free Piezoceramic Microrod Arrays by Sol–Gel Processing with Micromachined Silicon Templates
Fabrication of (K,Na)NbO3 Lead‐Free Piezoceramic Microrod Arrays by Sol–Gel Processing with Micromachined Silicon Templates
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DOI：
10.1111/j.1551-2916.2008.02582.x
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发表时间：
2008-09
影响因子：
3.9
通讯作者：
Y. Xu;Dawei Liu;Fengping Lai;Y. Zhen;Jingfeng Li
中科院分区：
文献类型：
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作者：
Y. Xu;Dawei Liu;Fengping Lai;Y. Zhen;Jingfeng Li
提出了一种结合溶胶-凝胶工艺和硅微成型技术制备K0.5Na0.5NbO3（KNN）无铅压电陶瓷微棒阵列的工艺。采用紫外光刻和感应耦合等离子体深反应离子刻蚀技术，对硅模具进行微加工，得到规则排列的柱状腔体，然后填充KNN溶胶，再进行热分解和退火处理。通过优化工艺条件，制备出横向宽度为15 μm、高度为30 μm、间距为70 μm的KNN陶瓷微棒阵列，X射线衍射分析表明其为钙钛矿相结构。
A microfabrication process combining sol-gel processing and silicon micromolding was proposed to fabricate microrod arrays of K 0.5 Na 0.5 NbO 3 (KNN) lead-free piezoelectric ceramics. By ultraviolet lithography and inductively coupled plasma deep reactive ion etching, a Si mold with a regular array of columnar cavities was micromachined, and then filled with KNN sol, followed by pyrolysis and annealing treatment. By optimizing the processing conditions, KNN ceramic microrod arrays of 15 μm lateral width, 30 μm height, and 70 μm spacing were produced, which were identified as perovskite phase structure by X-ray diffraction.