Diaphragm deflection control of piezoelectric ultrasonic microsensors for sensitivity improvement
Diaphragm deflection control of piezoelectric ultrasonic microsensors for sensitivity improvement
复制标题
压电超声微传感器的膜片偏转控制以提高灵敏度
DOI：
10.1016/j.sna.2007.04.048
复制
发表时间：
2007
影响因子：
4.6
通讯作者：
M. Okuyama
中科院分区：
文献类型：
--
作者：
K. Yamashita;Hiroki Nishimoto;M. Okuyama
利用压电PZT（Pb（Zr，Ti）O3）薄膜在硅微机械膜片结构上制作了阵列式超声微传感器。膜片的静态偏转强烈地影响灵敏度;向上偏转的膜片比向下偏转的膜片显示出高得多的灵敏度。阵列传感器已经使用改进的工艺制造，该工艺使得芯片上的膜片能够向上偏转，并且与向下的膜片相比，灵敏度已经成功地提高了4-6倍。
Arrayed ultrasonic microsensors have been fabricated using piezoelectric PZT (Pb(Zr,Ti)O3) thin film on micromachined silicon diaphragm structures. Static deflection of the diaphragms strongly affects the sensitivity; upward-deflected diaphragms show much higher sensitivity than downward-deflected diaphragms. Array sensors have been fabricated using modified processes which enable the diaphragms on a chip to deflect upward, and sensitivity has been successfully improved 4–6 times compared to the downward diaphragms.