Observation of nanometer-sized crystalline grooves in as-grown β-Ga2O3 single crystals
Observation of nanometer-sized crystalline grooves in as-grown β-Ga2O3 single crystals
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DOI：
10.7567/jjap.55.030303
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发表时间：
2016-03-01
影响因子：
1.5
通讯作者：
Kasu, Makoto
中科院分区：
文献类型：
--
作者：
Hanada, Kenji;Moribayashi, Tomoya;Kasu, Makoto
在生长的β-Ga 2 O3单晶的切割和抛光的表面上，我们发现纳米尺寸的凹槽在[001]方向上伸长。我们确认这些沟槽在[010]方向上终止于晶体内。这证明凹槽与穿透晶体的微管不同。它们的典型长度和宽度在[001]方向上分别为50- 1200 nm和在[100]方向上分别为40 nm。凹槽倾向于在[001]方向上形成阵列。纳米尺寸的凹槽的类型应该与蚀刻坑本质上不同。(C)2016日本应用物理学会
On the surface of as-grown beta-Ga2O3 single crystals that are cut and polished, we found nanometer-sized grooves elongated in the [001] direction. We confirmed that these grooves terminate within the crystals in the [010] direction. This proves that the grooves are different from micropipes penetrating crystals. Their typical length and width are 50-1200nm in the [001] direction and similar to 40nm in the [100] direction, respectively. The grooves tend to form an array in the [001] direction. The type of nanometer-sized grooves should be essentially different from etch pits. (C) 2016 The Japan Society of Applied Physics