Measurement of Adhesive Force Between Mold and Photocurable Resin in Imprint Technology
Measurement of Adhesive Force Between Mold and Photocurable Resin in Imprint Technology
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压印技术中模具与光固化树脂之间附着力的测量
DOI：
10.1143/jjap.41.4194
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发表时间：
2001
影响因子：
1.5
通讯作者：
K. Tada
中科院分区：
文献类型：
--
作者：
J. Taniguchi;Takeshi Kawasaki;Yuji Tokano;Y. Kogo;I. Miyamoto;M. Komuro;H. Hiroshima;N. Sakai;K. Tada
为了降低紫外光固化压印光刻中模具与光固化树脂之间的强粘附力，对石英模具的离型涂料和易离型的光固化树脂进行了研究。此外，使用拉伸试验机建立了压印模具和光固化树脂的脱模性能的测量方法。经表面处理的载玻片（SG）不粘附于树脂，粘附力显著降低。对于剥离涂层材料，KP-801 M的粘附力小于Aquaphobe CF的粘附力。在光固化树脂的情况下，PAK 01的粘合力小于TSR 820的粘合力。根据耐久性的测定结果，与使用PAK 01作为光固化性树脂的KP-801 M相比，Aquaphobe CF显示出良好的耐久性。通过双悬臂梁法测量断裂能，对于未处理SG和使用PAK 01光固化树脂用Aquaphobe CF表面处理的SG，所得值分别为3.64 N/m和2.77 N/m。在0.2 MPa压力和10 J/cm 2 UV剂量下，使用具有Aquaphobe CF的表面处理的石英模具在PAK 01树脂上以良好的保真度压印1 μm×2 μm的矩形图案而不撕裂。
In order to reduce the strong adhesive force between the mold and photocurable resin in UV-curable imprint lithography, release coating materials of the quartz mold and easy to release photocurable resin were examined. Furthermore, measurement methods of release properties of the imprint mold and photocurable resin were established using a tensile testing machine. The surface-treated slide-glass (SG) did not adhere to the resins and the adhesive forces were markedly reduced. For the release coating materials, the adhesive force for KP-801M was smaller than that for Aquaphobe CF. In the case of the photocurable resins, the adhesive force for PAK01 was smaller than that for TSR820. According to the measurement result of durability, Aquaphobe CF showed good durability compared with KP-801M using PAK01 as a photocurable resin. The fracture energies were measured by the double cantilever beam method, and the resultant values were 3.64 N/m and 2.77 N/m, respectively, for no-treatment SG and the surface-treated SG with Aquaphobe CF using PAK01 photocurable resin. The rectangular patterns of 1 µm×2 µm were imprinted with good fidelity without ripping on the PAK01 resin using a surface-treated quartz mold with Aquaphobe CF under 0.2 MPa pressure and 10 J/cm2 UV dose.