Comparison of different film thickness evaluation algorithms applicable to spectrometric interrogation systems
Comparison of different film thickness evaluation algorithms applicable to spectrometric interrogation systems
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适用于光谱询问系统的不同薄膜厚度评估算法的比较
DOI：
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发表时间：
2010
期刊：
影响因子：
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通讯作者：
A. Koch
中科院分区：
文献类型：
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作者：
F. Hirth;A. Pérez Grassi;D. G. Dorigo;A. Koch
膜厚测量有多种方法。本文的目的是薄膜测量方法的工作与波长相关的传感器信号，无论如何捕获的信号。这些测量系统被称为薄膜反射仪（TFR）。薄膜反射测量的分辨率受探测系统的光谱分辨率、光谱波长范围和分析算法的限制。分析了四种不同的薄膜测量算法的理论，并通过数值模拟对算法进行了比较。这些算法中的大多数都可以在文献和不同的软件库（例如MATLAB，LabVIEW......）中找到。为了比较不同的算法，薄膜的反射光强度已经针对示例性薄玻璃膜和常见的现成光谱仪、宽带可见光源和特征噪声水平进行了模拟。为四种选定的算法提供相同的数据，以比较结果。为了表征算法的分辨率、范围和准确度，计算了不同光谱窗口和分辨率的输出数据的标准偏差。因此，我们可以提供一个简明的建议，适当使用所提出的TFR算法。
There are various methods for film thickness measurement. This paper aims at thin film measurement methods which work with wavelength-dependent sensor signals, no matter how the signal was captured. These measurement systems are called Thin Film Reflectometers (TFR). The resolution of thin film reflection measurement is limited by the spectral resolution of the detection system, the spectral wavelength range and the analyzing algorithm. Analytical theory of four different algorithms for thin film measurement is described and algorithms are compared via numerical simulations. Most of these algorithms can be found both in the literature and in different software-libraries (e.g. MATLAB, LabVIEW...) To compare different algorithms, the reflected light intensities of a thin film have been simulated for an exemplary thin glass film and a common off-the-shelf-spectrometer, a broadband visible light source and characteristic noise levels. The same data was fed for four selected algorithms in order to compare the results. To characterize algorithms in resolution, range and accuracy, the standard deviation of the output data has been computed for different spectral windows and resolutions. As a result we can provide a concise recommendation for appropriate use of the presented TFR algorithms.