Ferromagnetic enhanced inductive plasma sources
Ferromagnetic enhanced inductive plasma sources
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DOI：
10.1088/0022-3727/46/28/283001
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发表时间：
2012-10
期刊：
影响因子：
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通讯作者：
V. Godyak
中科院分区：
文献类型：
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作者：
V. Godyak
本文的主题是对铁磁芯增强的感应耦合等离子体 (ICP) 源 (FMICP) 的综述，该源在各种应用中都有使用，包括等离子体聚变、空间推进、光源、等离子体化学和等离子体材料加工。这里介绍了 FMICP 的历史、早期的实现尝试、一些最新的发展以及成功的 FMICP 设备的示例。 FMICP 与传统 ICP 的比较研究表明，它们在功率传输效率、功率因数以及在低等离子体密度和小间隙下无射频等离子体电势的情况下运行的能力方面具有一定的优势，同时有效控制等离子体密度分布。
The subject of this paper is the review of inductively coupled plasma (ICP) sources enhanced with ferromagnetic cores, FMICP, found in various applications, including plasma fusion, space propulsion, light sources, plasma chemistry and plasma processing of materials. The history of FMICP, early attempts for their realization, some recent developments and examples of successful FMICP devices are given here. A comparative study of FMICPs with conventional ICPs demonstrates their certain advantages in power transfer efficiency, power factor and their ability to operate without rf plasma potentials at low plasma densities and with small gaps, while effectively controlling plasma density profile.