Study on Fabrication of Micrometer Patterned Ceramic Sheet with Micro Powder Imprinting (μPI) Method
Study on Fabrication of Micrometer Patterned Ceramic Sheet with Micro Powder Imprinting (μPI) Method
复制标题
微粉末压印（μPI）法制备微米图案陶瓷片的研究
DOI：
10.1166/asl.2012.2774
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发表时间：
2012
影响因子：
--
通讯作者：
Hideshi Miura
中科院分区：
文献类型：
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作者：
Yang Xu;Fujio Tsumori;Hyun Goo Kang;Hideshi Miura
具有微米级三维图案的陶瓷薄片在微机电系统领域有着广泛的应用前景，本文改进了一种新的微米级粉末压印方法，以氧化锆纳米级粉末为原料制备了具有微米级三维图案的陶瓷薄片。为了从400 μm陶瓷片上去除模具，在粘结剂的玻璃态温度下，用3种模具在陶瓷片上压印出5 μm ~ 1 mm的微米级线条和空间图案。在脱脂和烧结步骤中，将研究和讨论诸如加热和冷却比、烧结温度等参数对最终样品的机械性能（诸如板的平整度、孔隙率和硬度）的影响。最后，将μPI法制备的300 μm厚的微图形陶瓷片用于固体氧化物燃料电池的电解质。
The ceramic thin sheet with micrometer scale 3D patterns may be used widely in the field of Micro Electro Mechanical Systems and we improved a new method of micro powder imprinting to fabricate the thin sheet with the powder of zirconia nanometer scale powder. The micrometer scale line and space patterns from 5 μm to 1 mm were imprinted on ceramic sheets at the binder's glassy state temperature with three kinds of mold in order to remove the mold from 400 μm ceramic sheets. In debinding and sintering steps, effects of parameters such as heating and cooling ratio, temperature of sintering on the final sample's mechanical properties such as the flatness of sheet, porosity and hardness will be investigated and discussed. Finally, we employed the 300 μm thick ceramic sheets with micro patterns fabricated by the μPI method for the electrolyte for solid oxide fuel cell.