High-Q germanium optical nanocavity
High-Q germanium optical nanocavity
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DOI：
10.1364/prj.6.000925
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发表时间：
2018-08
影响因子：
7.6
通讯作者：
Tinghui Xiao;Ziqiang Zhao;Wen Zhou;M. Takenaka;H. Tsang;Zhenzhou Cheng;K. Goda
中科院分区：
文献类型：
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作者：
Tinghui Xiao;Ziqiang Zhao;Wen Zhou;M. Takenaka;H. Tsang;Zhenzhou Cheng;K. Goda
中红外（MIR）集成光子学因其在生化传感、环境监测、疾病诊断和光通信方面的广阔应用而引起了广泛的兴趣。在MIR集成平台中，基于锗的平台具有许多优异的特性，例如宽透明窗口、高折射率和高非线性系数；然而，中红外锗光子器件的发展仍处于起步阶段。具体而言，MIR 高 Q 锗谐振器的性能与硅谐振器相当，这仍然是前所未有的。在这里，我们通过实验展示了 Q 因子约为 18,000 的 MIR 锗纳米腔，这是迄今为止报道的基于 MIR 锗的集成平台中最高的纳米腔。这是通过结合可行的理论设计、晶圆开发的智能切割方法和优化的器件制造工艺来实现的。我们的纳米腔具有高 Q 因子和超小模式体积，为 MIR 光谱范围内的片上应用开辟了新途径。
Mid-infrared (MIR) integrated photonics has attracted broad interest due to its promising applications in biochemical sensing, environmental monitoring, disease diagnosis, and optical communication. Among MIR integration platforms, germanium-based platforms hold many excellent properties, such as wide transparency windows, high refractive indices, and high nonlinear coefficients; however, the development of MIR germanium photonic devices is still in its infancy. Specifically, MIR high-Q germanium resonators with comparable performance to their silicon counterparts remain unprecedented. Here we experimentally demonstrate an MIR germanium nanocavity with a Q factor of ∼18,000, the highest-to-date of reported nanocavities across MIR germanium-based integration platforms. This is achieved through a combination of a feasible theoretical design, Smart-Cut methods for wafer development, and optimized device fabrication processes. Our nanocavity, with its high Q factor and ultrasmall mode volume, opens new avenues for on-chip applications in the MIR spectral range.