Direct Phase Measurement Of Aspheric Surface Contours
Direct Phase Measurement Of Aspheric Surface Contours
复制标题
DOI：
10.1117/12.964494
复制
发表时间：
1986-11
期刊：
影响因子：
--
通讯作者：
K. Creath;J. Wyant
中科院分区：
文献类型：
--
作者：
K. Creath;J. Wyant
双波长全息术和相移干涉测量相结合，以可变的灵敏度测量非球面轮廓。在该技术中，可以在合成的较长等效波长 λeq = λaλb|λa - λb| 下有效地测试表面。使用在波长 λa 和 λb 处进行的测量，其中针对 λa 和 λb 测量的相位差产生 λeq 处的模 2π 相位。将点孔径掩模放置在探测器阵列上方，以解析紧密间隔的条纹。该技术的均方根重复性为 λeq/100。讨论了该技术的局限性并显示了结果。
Two-wavelength holography and phase-shifting interferometry are combined to measure aspheric surface contours with a variable sensitivity. In this technique, the surface is effectively tested at a synthesized longer equivalent wavelength λeq = λaλb|λa - λb| using measurements made at wavelengths λa and λb where the difference of the phases measured for λa and λb yields the modulo 2π phase at λeq. A mask of point apertures is placed over the detector array in order to resolve closely spaced fringes. This technique has an rms repeatability of λeq/100. Limits to this technique are discussed and results are shown.