Influence of Sapphire thickness on GaN wafer bowing grown by the Na-flux method with sapphire dissolution process

Influence of Sapphire thickness on GaN wafer bowing grown by the Na-flux method with sapphire dissolution process
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蓝宝石厚度对蓝宝石溶解Na助熔法生长GaN晶片弯曲的影响

DOI:
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发表时间:
2017
期刊:
影响因子:
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通讯作者:
and Yusuke Mori
and Yusuke Mori
中科院分区:
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文献类型:
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作者:
Takumi Yamada;Kosuke Murakami;Kosuke Nakamura; Tomoko Kitamura;Keisuke Kakinouchi;Kanako Okumura; Masayuki Imanishi;Mamoru Imade;Masashi Yoshimura;and Yusuke Mori

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