Sacrificial template method to fabricate highly sensitive porous capacitive pressure sensor for full pulse waveforms detection

Sacrificial template method to fabricate highly sensitive porous capacitive pressure sensor for full pulse waveforms detection
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DOI:
10.1117/12.2665344
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发表时间:
2022-10
期刊:
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影响因子:
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通讯作者:
A. Chowdhury;Borzooye Jafarizadeh;N. Pala;Chunlei Wang
A. Chowdhury;Borzooye Jafarizadeh;N. Pala;Chunlei Wang
中科院分区:
其他
文献类型:
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作者:
A. Chowdhury;Borzooye Jafarizadeh;N. Pala;Chunlei Wang

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具有高灵敏度的柔性压力传感器因其在触觉传感、生理监测和柔性电子产品等一系列应用中的潜力而引起了广泛关注。这些传感器的商业化仍然受到难以在保持廉价生产成本的同时获得高灵敏度的阻碍。在这项研究中描述的电容传感器的低成本方法使用的牺牲模板的多孔PDMS聚合物和基于多壁碳纳米管复合材料的介电层。当将MWCNT添加到PDMS中时,复合聚合物的较高介电常数导致传感器的高灵敏度为4.9kPa-1,低于1 kPa。由于其极端的敏感性,它可以识别触觉压力和脉搏波形的微小变化。
Flexible pressure sensors with high sensitivity have drawn a lot of attention due to their potential in a range of applications, including tactile sensing, physiological monitoring, and flexible electronics. The commercialization of these sensors is still hampered by the difficulty of getting great sensitivity while keeping cheap production costs. The low-cost method for making capacitive sensors described in this study uses a sacrificial template made of a porous PDMS polymer and a dielectric layer based on MWCNT composites. When MWCNT is added to PDMS, the composite polymer's higher dielectric constant results in the sensor's high sensitivity of 4.9 kPa-1 below 1 kPa. Due to its extreme sensitivity, it can recognize minute changes in tactile pressure and pulse waveforms.