New strategy for controlling the size and shape of metallic features formed by electroless deposition of copper: Microcontact printing of catalysts on oriented polymers, followed by thermal shrinkage
New strategy for controlling the size and shape of metallic features formed by electroless deposition of copper: Microcontact printing of catalysts on oriented polymers, followed by thermal shrinkage
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DOI：
10.1021/la960238u
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发表时间：
1996-10-16
期刊：
影响因子：
3.9
通讯作者：
Whitesides, GM
中科院分区：
文献类型：
--
作者：
Hidber, PC;Nealey, PF;Whitesides, GM
本文介绍了一种减小化学沉积金属特征尺寸和制造复杂形状、图案化表面的新方法。采用微接触印花技术(MU CP)制备了以溴化十四烷基铵为稳定剂的钯胶体定向玻璃聚合物。这些胶体是选择性化学沉积铜的催化剂。在略高于其玻璃化转变温度的温度下对活化的聚合物进行热处理会导致基片的收缩。将收缩的衬底浸泡在镀液中，即可获得金属特征。所获得的特征尺寸的最大收缩在取向聚合物的一个方向上约为4倍，在垂直方向上约为7倍。收缩程度和方向的控制允许制造尺寸和形状不同于用于基材图案化的聚二甲基硅氧烷印章上的尺寸和形状的金属特征，以及不同于拉深比的金属特征。在金属膜达到所需厚度后，通过溶解衬底来产生自立式金属结构。通过将活化的聚合物薄膜包裹在脚手架或模板周围，可以制造复杂形状的图案化表面；在退火过程中，聚合物适应底层脚手架的形状。激活的、成形的衬底的金属化导致了图案化的三维结构。
This paper describes a new method of reducing the size of the metal features made by electroless deposition and fabricating complex-shaped, patterned surfaces. Microcontact printing (mu CP) was used to pattern oriented glassy polymers with palladium colloids, stabilized with tetraoctadecylammonium bromide. These colloids are catalysts for the selective electroless deposition of copper. Annealing of the activated polymer at a temperature slightly above its glass transition temperature led to a shrinkage of the substrate. Immersion of the shrunken substrate in the plating bath yielded the metal features. The maximum shrinkage of the feature size achieved was on the order of a factor of similar to 4 in one direction of the oriented polymer and of similar to 7 in the perpendicular direction. Control of the extent and direction of shrinkage allowed the fabrication of metal features with sizes and shapes different from those on the polydimethylsiloxane stamp used for the patterning of the substrate and from the draw ratios. Free-standing metal structures were produced by dissolving the substrate after the metal film had reached the desired thickness. Complex-shaped, patterned surfaces could be fabricated by wrapping the activated polymer film around a scaffolding or template; during the annealing, the polymer adapted the shape of the underlying scaffolding. Metalization of the activated, shaped substrate resulted in patterned three-dimensional structures.