Epitaxial niobium nitride superconducting nanowire single-photon detectors
Epitaxial niobium nitride superconducting nanowire single-photon detectors
复制标题
外延型氮化铌超导纳米线单光子探测器
DOI：
10.1063/5.0018818
复制
发表时间：
2020-09-28
影响因子：
4
通讯作者：
Tang, Hong X.
中科院分区：
文献类型：
--
作者：
Cheng, Risheng;Wright, John;Tang, Hong X.
用于单光子探测器的超导纳米线已在非晶或多晶薄膜上实现。在此，我们报道了首次将单晶氮化铌（NbN）薄膜用于超导纳米线单光子探测器（SNSPDs）。通过分子束外延（MBE）在高温下在近乎晶格匹配的蓝宝石上氮化铝（AlN-on -sapphire）衬底上生长，NbN薄膜呈现出高度的均匀性和一致性。即使薄膜相对较厚，所制备的纳米线探测器在近红外波长下也显示出饱和的内量子效率，这表明了通过分子束外延生长的NbN在实现大规模片上SNSPD阵列以及与基于氮化铝的二阶非线性量子光子电路集成方面的潜力。
Superconducting nanowires used in single-photon detectors have been realized on amorphous or poly-crystalline films. Here, we report the first use of single-crystalline NbN thin films for superconducting nanowire single-photon detectors (SNSPDs). Grown by molecular beam epitaxy (MBE) at high temperature on nearly lattice-matched AlN-on-sapphire substrates, the NbN films exhibit a high degree of uniformity and homogeneity. Even with relatively thick films, the fabricated nanowire detectors show saturated internal efficiency at near-IR wavelengths, demonstrating the potential of MBE-grown NbN for realizing large arrays of on-chip SNSPDs and their integration with AlN-basedchi( 2 ) quantum photonic circuits.