Localised solid-state nanopore fabrication via controlled breakdown using on-chip electrodes
Localised solid-state nanopore fabrication via controlled breakdown using on-chip electrodes
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DOI：
10.1007/s12274-022-4535-8
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发表时间：
2022-06-25
期刊：
影响因子：
9.9
通讯作者：
Mol，Jan A.
中科院分区：
文献类型：
--
作者：
Fried，Jasper P.;Swett，Jacob L.;Mol，Jan A.
受控击穿最近已经成为一种高度可访问的技术来制造固态纳米孔。然而，在其最常见的形式中，受控击穿在膜中的任意位置处产生单个纳米孔。在这里，我们介绍了一种新的策略，即通过在片上电极和与膜的相对侧接触的电解质溶液之间施加电场来进行击穿。我们证明了这种方法的两个优点。首先，我们可以通过将施加的场定位到电极，在膜中的给定位置独立地制造多个纳米孔。第二，我们可以通过向芯片上电极施加电压以在受控击穿期间局部加热膜来创建与互补纳米电极自对准的纳米孔。这种新的受控击穿方法提供了一条通往可负担得起的、快速的和自动化的纳米孔阵列的制造的道路，所述纳米孔阵列与互补的芯片上纳米结构自对准。
Controlled breakdown has recently emerged as a highly accessible technique to fabricate solid-state nanopores. However, in its most common form, controlled breakdown creates a single nanopore at an arbitrary location in the membrane. Here, we introduce a new strategy whereby breakdown is performed by applying the electric field between an on-chip electrode and an electrolyte solution in contact with the opposite side of the membrane. We demonstrate two advantages of this method. First, we can independently fabricate multiple nanopores at given positions in the membrane by localising the applied field to the electrode. Second, we can create nanopores that are self-aligned with complementary nanoelectrodes by applying voltages to the on-chip electrodes to locally heat the membrane during controlled breakdown. This new controlled breakdown method provides a path towards the affordable, rapid, and automatable fabrication of arrays of nanopores self-aligned with complementary on-chip nanostructures.