Novel sp^3-bonded BN films of 5H-polytypic crystal structure prepared by laser-assisted plasma CVD and their excellent electron field emission

Novel sp^3-bonded BN films of 5H-polytypic crystal structure prepared by laser-assisted plasma CVD and their excellent electron field emission
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激光辅助等离子体CVD制备的新型5H多型晶体结构的sp^3键合BN薄膜及其优异的电子场发射性能

DOI:
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发表时间:
2005
期刊:
15^<th> internat.Colloquium on Plasma processes Abstract booklets 1・1
影响因子:
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通讯作者:
M.Shiratani
M.Shiratani
中科院分区:
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文献类型:
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作者:
S.Komatsu;K.Okada;D.Kazami;A.Okudo;Y.Moriyoshi;M.Shiratani

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