Miniature vector magnetometer for scanning SQUID microscopy
Miniature vector magnetometer for scanning SQUID microscopy
复制标题
用于扫描 SQUID 显微镜的微型矢量磁力计
DOI：
10.1109/77.621997
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发表时间：
1997
影响因子：
1.8
通讯作者：
M. Bhushan
中科院分区：
文献类型：
--
作者：
M. Ketchen;J. Kirtley;M. Bhushan
我们已经演示了一种微型矢量磁强计，用于在平面样品附近成像磁场的三个垂直分量。该磁强计由三个独立的SQUID组成，采用平面化的三级金属低T_c工艺制造在平面基板上，其特征小至0.8/SPL MU/m。z轴SQUID有一个传统的方形拾取环路，大小约为10/SPL MU/m，通过完全封闭的平面同轴引线结构连接到遥远的隧道结。X轴和y轴的SQUID具有相似的设计，不同之处在于拾取器结构是大小约为10/每微米的多圈平面螺线管的形式。在这篇文章中，我们将讨论这种器件的设计、制造和表征，以及单个俘获磁通量子成像的初步结果。
We have demonstrated a miniature vector magnetometer for imaging three orthogonal components of the magnetic field in close proximity to a planar sample. This magnetometer consists of three separate SQUIDs fabricated adjacent to each other on a planar substrate using a planarized, three-level-of-metal low-Tc process with features as small as 0.8 /spl mu/m. The z-axis SQUID has a conventional single square pick-up loop, approximately 10 /spl mu/m in size, that connects to remotely located tunnel junctions via a totally enclosed planar coaxial lead structure. The x- and y-axis SQUIDs are of similar design except that the pick-up structures are in the form of multiple-turn planar solenoids about 10 /spl mu/m in size. In this paper we will discuss the design, fabrication, and characterization of the devices along with initial results of the imaging of individual trapped flux quanta.