AN ARRAY OF MONOLITHIC FBAR-CMOS OSCILLATORS FOR MASS-SENSING APPLICATIONS.
AN ARRAY OF MONOLITHIC FBAR-CMOS OSCILLATORS FOR MASS-SENSING APPLICATIONS.
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用于质量传感应用的单片 FBAR-CMOS 振荡器阵列。
DOI：
10.1109/sensor.2009.5285771
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发表时间：
2009
期刊：
影响因子：
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通讯作者：
Shepard,KL
中科院分区：
文献类型：
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作者：
Johnston,ML;Kymissis,I;Shepard,KL
我们提出了一种用于质量传感应用的单片，坚固安装的CMOS-FBAR振荡器阵列。薄膜体声谐振器（FBAR）是灵敏的生物和化学检测的有效平台，其高工作频率使其比石英晶体微天平灵敏许多倍。通过与CMOS驱动电路的单片集成，我们的目标是克服外部耦合谐振器的空间限制，在没有专门制造技术的情况下构建密集的传感器阵列。这项工作中的传感器是在0.18 μ m CMOS有源衬底上以6 × 4阵列构建的，并且证明了与片外FBAR传感器相当的质量灵敏度。
We present a monolithic, solidly-mounted CMOS-FBAR oscillator array for mass sensing applications. Thin-film bulk acoustic resonators (FBAR) are an affective platform for sensitive biological and chemical detection, where their high operating frequencies make them many times more sensitive than a quartz crystal microbalance. By monolithic integration with CMOS drive circuitry, we aim to overcome the spatial limiations of externally-coupled resonators to build dense sensor arrays without specialized fabrication techniques. The sensors in this work are constructed in a 6 times 4 array atop a 0.18mum CMOS active substrate, and mass sensitivity comparable to off-chip FBAR sensors is demonstrated.