Catalytic nanopores for electroless deposition of adhesive metal films on silicon : Applications to various silicon substrates including multi- and micro-crystalline
Catalytic nanopores for electroless deposition of adhesive metal films on silicon : Applications to various silicon substrates including multi- and micro-crystalline
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用于在硅上化学沉积粘合金属膜的催化纳米孔:在包括多晶和微晶在内的各种硅基底上的应用
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发表时间:
2011
期刊:
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通讯作者:
Shinji Yaw
中科院分区:
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作者:
Shinji Yae;Keisuke Sakabe;Naoki Fukumuro;Susumu Sakamoto;Hitoshi Matsuda;Shinji Yaw