Study of structure and optical properties of β-FeSi2 precipitates formed by ion-implantation of Fe+ in Si(100) and effects of co-implantation of Fe+ and Si+ in amorphous SiO2
Study of structure and optical properties of β-FeSi2 precipitates formed by ion-implantation of Fe+ in Si(100) and effects of co-implantation of Fe+ and Si+ in amorphous SiO2
复制标题
Si(100)离子注入Fe+形成的β-FeSi2析出物的结构和光学性质以及非晶SiO2中Fe+和Si+共注入的影响研究
DOI：
10.1016/s0040-6090(00)01743-0
复制
发表时间：
2001
期刊：
影响因子：
2.1
通讯作者：
S. Mantl
中科院分区：
文献类型：
--
作者：
K. Oyoshi;D. Lenssen;R. Carius;S. Mantl
