A newly developed linear motor-driven aerostatic X-Y planar motion table system for nano-machining
A newly developed linear motor-driven aerostatic X-Y planar motion table system for nano-machining
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DOI：
10.1016/j.cirp.2007.05.086
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发表时间：
2007-01-01
影响因子：
4.1
通讯作者：
Taniguchi, K.
中科院分区：
文献类型：
--
作者：
Shinno, H.;Yoshioka, H.;Taniguchi, K.
纳米加工工艺在各行各业的重要性不断提高。特别是在电子和汽车工业中，在广泛的工作领域中对稳定的纳米级精度的加工需求最近有所增加。为了满足这样的工业要求，有必要开发基于新的设计理念的超精密机床。因此，本研究开发了一种新型的直线电机驱动的气动平面运动平台系统。实际加工试验结果表明，所开发的工作台系统具有良好的性能。
The importance of nano-machining processes is continually increasing in a wide range of industries. In particular, the demands for machining with stable nanometer order accuracy in a wide work area have recently increased in the electronics and automotive industries. In order to meet such industrial requirements, it is necessary to develop an ultraprecision machine tool based on a new design concept. Therefore, in this study, a novel linear motor-driven aerostatic planar motion table system was developed for nano-machining. The,results of actual machining tests confirmed that the developed table system has a remarkable performance.