Development of a strong field helicon plasma source
Development of a strong field helicon plasma source
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DOI：
10.1063/1.2173940
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发表时间：
2006-03
影响因子：
1.6
通讯作者：
S. Shinohara;H. Mizokoshi
中科院分区：
文献类型：
--
作者：
S. Shinohara;H. Mizokoshi
我们开发了一种高密度螺旋等离子体源，其磁场强度高达 10kG。使用缠绕在石英管上的双环天线，内径为 9.5cm，轴向长度为 90cm，在射频功率小于几千瓦的情况下，在改变磁场、填充压力和气体种类的情况下，成功地产生了密度超过 1013cm−3 的初始等离子体。
We developed a high-density helicon plasma source with a very strong field of up to 10kG. Using a double-loop antenna wound around a quartz tube, 9.5cm in inner diameter and 90cm in axial length, initial plasmas with a high density more than 1013cm−3 were successfully produced with a radio frequency power less than a few kilowatts, and with changing magnetic fields, fill pressures, and gas species.