Fabrication of ZnSe-based microcavities for lasing in the strong coupling regime and polariton confinement
Fabrication of ZnSe-based microcavities for lasing in the strong coupling regime and polariton confinement
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强耦合状态和极化子限制下激光发射的 ZnSe 基微腔的制造
DOI：
10.1002/pssc.201300705
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发表时间：
2014
期刊：
影响因子：
--
通讯作者：
M. Richard
中科院分区：
文献类型：
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作者：
T. Klein;S. Klembt;K. Sebald;S. Figge;A. Gust;C. Kruse;D. Hommel;J. Gutowski;E. Durupt;D. Le Si Dang;M. Richard
我们报告了单片的实现，即具有 1λ 腔和 3λ 腔的全外延 ZnSe 基微腔，用于研究强耦合现象。一个关键的构建模块是制造蓝色光谱区域的晶格匹配分布式布拉格反射器，由作为高折射率材料的四元 ZnMgSSe 层和作为低折射率材料的 MgS/ZnCdSe 超晶格组成。 1λ腔（70K）的真空拉比分裂为19 meV，3λ腔（7 K）的真空拉比分裂为40 meV，实现了低温下的强耦合。使用聚焦离子束蚀刻制造了微柱、波导、环形谐振器和分子链等微结构。对于两个腔长度都观察到微柱中的离散光学模式，证实了三维光学限制。 Q 因子高达 6500 表明光学质量很高。 （© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA，魏因海姆）
We report on the realization of monolithic, i.e. fully epitaxial ZnSe‐based microcavities with a 1λ‐cavity and a 3λ‐cavity for the investigation of strong coupling phenomena. A crucial building block is the fabrication of a lattice matched distributed Bragg reflector for the blue spectral region, consisting of quaternary ZnMgSSe layers as the high‐index material and a MgS/ZnCdSe superlattice as the low‐index material. Strong coupling at low temperatures was achieved with a vacuum Rabi splitting of 19 meV for the 1λ‐cavity (at 70K) and of 40 meV for the 3λ‐cavity (at 7 K).Microstructures such as micropillars, waveguides, ringresonators, and molecule chains were fabricated using focused ion‐beam etching. Discrete optical modes in micropillars were observed for both cavity lengths confirming three‐dimensional optical confinement. Q‐factors up to 6500 indicate a high optical quality. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)