Antireflection effect in ultrahigh spatial-frequency holographic relief gratings.
Antireflection effect in ultrahigh spatial-frequency holographic relief gratings.
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DOI：
10.1364/ao.26.001142
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发表时间：
1987-03
期刊：
影响因子：
1.9
通讯作者：
Y. Ono;Y. Kimura;Y. Ohta;N. Nishida
中科院分区：
文献类型：
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作者：
Y. Ono;Y. Kimura;Y. Ohta;N. Nishida
提出了超高空间频率全息浮雕光栅低反射率的解释模型。该模型是基于光栅有效折射率在深度方向上是渐变的概念，它由光栅的空间频率引起，并形成类似于多层膜的减反射结构。数值结果表明，正弦光栅在宽的槽深、波长和入射角范围内都具有减反射特性，而截面近似三角形、折射率分布为圆弧形的光栅反射率很低，>10（-4）%。反射率与槽深，实验获得的全息记录的光致抗蚀剂光栅，同意相当好的数值结果。
An interpretation model for low reflectivity in ultrahigh spatial-frequency holographic relief gratings is proposed. The model is based on the concept that the grating effective index, caused by grating ultrahigh spatial frequency, is graded in the depth direction and forms an antireflective constitution similar to the multilayer coating. Numerical results show that a sinusoidal grating is antireflective over wide groove depth, wavelength and incident angle ranges, and a grating with nearly triangular section, having a circle arc index distribution, has a very low reflectivity, >10(-4)%. Reflectivity vs groove depth, obtained experimentally for a holographically recorded photoresist grating, agrees fairly well with the numerical results.