Preparation of nitrogen-doped titanium oxide thin film using a PLD method as parameters of target material and nitrogen concentration ratio in nitrogen/oxygen gas mixture

Preparation of nitrogen-doped titanium oxide thin film using a PLD method as parameters of target material and nitrogen concentration ratio in nitrogen/oxygen gas mixture
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DOI:
10.1016/j.tsf.2004.07.047
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发表时间:
2005-03
期刊:
影响因子:
2.1
通讯作者:
Y. Suda;Hiroharu Kawasaki;T. Ueda;T. Ohshima
Y. Suda;Hiroharu Kawasaki;T. Ueda;T. Ohshima
中科院分区:
材料科学3区
文献类型:
--
作者:
Y. Suda;Hiroharu Kawasaki;T. Ueda;T. Ohshima

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