Preparation and characterization of sol–gel Y2O3 planar waveguides
Preparation and characterization of sol–gel Y2O3 planar waveguides
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DOI：
10.1016/s0925-3467(01)00172-0
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发表时间：
2001-12
影响因子：
3.9
通讯作者：
L. Lou;Wenhua Zhang;A. Brioude;C. Luyer;J. Mugnier
中科院分区：
文献类型：
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作者：
L. Lou;Wenhua Zhang;A. Brioude;C. Luyer;J. Mugnier
采用溶胶-凝胶法和浸涂法制备了Y2 O3薄膜波导。多层涂覆操作是生产多模和低衰减系数波导所必需的。厚度和折射率由m线光谱测定。X射线衍射（XRD）和传统的透射电子显微镜（CTEM）被用于结构调查和纳米晶体的尺寸测定作为退火温度的函数。在较低的热处理温度（300°C）下观察到Y2 O3非晶相，当退火温度达到400°C时，层转变为立方纳米晶形式。需要在600°C下进行退火处理以提供表现出低于2dB/cm的衰减系数的更致密和良好的光学平面波导。
Y2O3thin film waveguides were prepared using a sol–gel method and a dip-coating procedure. Multicoating operations were necessary to produce multimode and low attenuation coefficient waveguides. Thickness and refractive index were determined by m-lines spectroscopy. X-ray diffraction (XRD) and conventional transmission electron microscopy (CTEM) were used for structural investigations and nanocrystals size determination as a function of the annealing temperature. The Y2O3amorphous phase was observed at low heat-treatment temperature (300°C) and the layers turn to cubic nanocrystalline form when the annealing temperature reached 400°C. An annealing treatment at 600°C was necessary to provide more densified and good optical planar waveguides exhibiting an attenuation coefficient lower than 2 dB/cm.