TEM Tomography of Pores with Application to Computational Nanoscale Flows in Nanoporous Silicon Nitride (NPN).

TEM Tomography of Pores with Application to Computational Nanoscale Flows in Nanoporous Silicon Nitride (NPN).
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DOI:
10.3390/membranes8020026
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发表时间:
2018-06-02
期刊:
影响因子:
4.2
通讯作者:
McGrath JL
McGrath JL
中科院分区:
工程技术4区
文献类型:
--
作者:
Madejski G;Lucas K;Pascut FC;Webb KF;McGrath JL

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硅纳米膜技术(NPN、pnc-Si等)已在商业上用作电子显微镜(EM)衬底,并用作具有纳米分辨率尺寸截止值的过滤器。与EM相结合,这些材料提供了一个平台,用于捕获或悬挂纳米尺度的结构进行分析。有利地,纳米膜本身可以被制造以实现各种纳米孔形貌。纳米孔的尺寸、形状和表面将影响传输、结垢、筛分和电行为。用于重建纳米尺度结构的电子断层扫描(ET)技术将提供捕捉这种变化的绝佳方法。因此,我们修改了样品保持器以接受我们的标准化5.4 mm × 5.4 mm硅纳米膜芯片,并使用透射电子显微镜(TEM)成像NPN纳米膜(50-100 nm厚,10-100 nm纳米孔径)。在使用一系列免费提供的工具(ImageJ,TomoJ,SEG 3D 2,Meshlab)进行成像和ET重建后,我们使用COMSOL Multiphysics™模拟重建纳米孔内的流体流动。结果显示,流动剖面比简单的圆柱模型预测的要复杂得多,纳米孔内有停滞区域。我们预计,超薄纳米孔的这种层析重建对于阐明硅纳米膜许多应用的物理基础将很有价值。
Silicon nanomembrane technologies (NPN, pnc-Si, and others) have been used commercially as electron microscopy (EM) substrates, and as filters with nanometer-resolution size cut-offs. Combined with EM, these materials provide a platform for catching or suspending nanoscale-size structures for analysis. Usefully, the nanomembrane itself can be manufactured to achieve a variety of nanopore topographies. The size, shapes, and surfaces of nanopores will influence transport, fouling, sieving, and electrical behavior. Electron tomography (ET) techniques used to recreate nanoscale-sized structures would provide an excellent way to capture this variation. Therefore, we modified a sample holder to accept our standardized 5.4 mm × 5.4 mm silicon nanomembrane chips and imaged NPN nanomembranes (50–100 nm thick, 10–100 nm nanopore diameters) using transmission electron microscopy (TEM). After imaging and ET reconstruction using a series of freely available tools (ImageJ, TomoJ, SEG3D2, Meshlab), we used COMSOL Multiphysics™ to simulate fluid flow inside a reconstructed nanopore. The results show flow profiles with significantly more complexity than a simple cylindrical model would predict, with regions of stagnation inside the nanopores. We expect that such tomographic reconstructions of ultrathin nanopores will be valuable in elucidating the physics that underlie the many applications of silicon nanomembranes.
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