Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications
Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications
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DOI：
10.1016/j.cirp.2008.03.077
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发表时间：
2008-01-01
影响因子：
4.1
通讯作者：
Yamashita, K.
中科院分区：
文献类型：
--
作者：
Namba, Y.;Shimomura, T.;Yamashita, K.
化学镀镍是制造光学模具的最佳材料之一，因为它具有单点金刚石车削和抛光的可加工性，以及合适的硬度和耐用性。研究了新一代硬X射线望远镜反射镜非球面模具的超精密抛光技术，该技术要求模具表面粗糙度小于0.3nm。使用各种方法加工该材料，并且在直径为300 mm的非球面成型模具上获得0.23 nm rms的表面粗糙度。在铂/碳多层膜反射镜上实现了0.16 nm RMS的表面粗糙度，从平面模具复制。(c)2008年CIRP。
Electroless nickel is one of the best materials for making optical molding dies, because of its machinability with both single-point diamond turning and polishing, as well as its suitable hardness and durability. This paper deals with the ultra-precision polishing of aspheric molding dies for next-generation hard X-ray telescope mirrors, which require a super smooth surface with a roughness below 0.3 nm root-mean-square (rms). The material was machined using various methods, and a surface roughness of 0.23 nm rms was obtained on aspheric molding dies of 300 mm in diameter. A surface roughness of 0.16 nm rms was achieved on platinum/carbon multilayer mirrors, replicated from plano dies. (c) 2008 CIRP.