Mechanical characterization of a piezo-operated thermal imprint system

Mechanical characterization of a piezo-operated thermal imprint system
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压电驱动热压印系统的机械特性

DOI:
10.1116/1.3656048
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发表时间:
2011
期刊:
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
影响因子:
--
通讯作者:
H. Scheer
H. Scheer
中科院分区:
--
文献类型:
--
作者:
A. Mayer;S. Moellenbeck;K. Dhima;Si Wang;H. Scheer

文献摘要

被引文献

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研究了压印过程中动态搅拌对降低热塑性材料压印温度的影响。所使用的压印系统由步进电机和压电单元作为主要部件组成。电机控制系统的工作点,压电单元的正弦运动(3个压电元件彼此成120°)叠加额外的动态激励。该系统的特点是其机械行为,利用机械和电气量之间的类比。结果表明,该系统可以在高达约60 Hz的频率下工作,并且压电元件在系统中充当动态运动源。在100 °C下用聚苯乙烯进行的第一次压印实验表明了这种频率辅助压印技术的潜力。
Dynamic agitation during imprint is investigated as a means to reduce the imprint temperature of thermoplastic materials. The imprint system used consists of a stepping motor and a piezo unit as the main components. The motor controls the working point of the system, and a sinusoidal motion of the piezo unit (3 piezos at 120° with respect to each other) superimposes an additional dynamic excitation. The system was characterized with respect to its mechanical behavior by exploiting analogies between mechanical and electrical quantities. The results show that the system can be operated at a frequency of up to about 60 Hz and that the piezos act as a dynamic motion source in the system. First imprint experiments with polystyrene at 100 °C indicate the potential of this frequency-assisted imprint technique.