Non-contact R-test with laser displacement sensors for error calibration of five-axis machine tools
Non-contact R-test with laser displacement sensors for error calibration of five-axis machine tools
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DOI：
10.1016/j.precisioneng.2012.07.012
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发表时间：
2013-01-01
影响因子：
3.6
通讯作者：
Ibaraki, Soichi
中科院分区：
文献类型：
--
作者：
Hong, Cefu;Ibaraki, Soichi
R测试是通过使用三个位移传感器来测量附接到主轴的精密球体相对于工作台的三维位移的仪器。它在五轴机床误差标定中的应用已经在学术界和工业界得到了广泛的研究。为了简化球体中心位移的计算，所有传统的R测试设备都使用带有平头探头的接触式位移传感器。传统的接触式R测试可能会受到位移传感器中支撑弹簧的摩擦或动力学的影响，特别是在动态测量中。提出了一种基于激光位移传感器的非接触式R检验方法。首先，提出了一种利用非接触式位移传感器测量球心三维位移的新算法。对激光位移传感器由于靶球曲率引起的测量误差进行了补偿。然后，对4种不同测量原理的激光位移传感器在测量球体几何形状时的测量不确定度进行了实验研究，以选择最适合应用于非接触R测试的激光位移传感器。为了验证所提出的非接触式R测试算法，研制了一台非接触式R测试样机。实验案例研究的误差校准（1）静态和（2）在五轴机床旋转轴的动态误差运动与开发的非接触R-测试原型。它的测量性能进行了比较，传统的接触式R-测试设备。(c)2012 Elsevier Inc. All rights reserved.
The R-test is an instrument to measure three-dimensional displacement of a precision sphere attached to a spindle relative to a work table by using three displacement sensors. Its application to error calibration for five-axis machine tools has been studied in both academia and industry. For the simplicity in calculating the sphere center displacement, all conventional R-test devices use contact-type displacement sensors with a flat-ended probe. Conventional contact-type R-test may be potentially subject to the influence of the friction or the dynamics of supporting spring in displacement sensors particularly in dynamic measurement. This paper proposes a non-contact R-test with laser displacement sensors. First, a new algorithm is proposed to calculate the three-dimensional displacement of sphere center by using non-contact displacement sensors. The compensation of measurement error of a laser displacement sensor due to the curvature of target sphere is incorporated. Then, the measurement uncertainty of four laser displacement sensors with different measuring principles is experimentally investigated in measuring the geometry of a sphere in order to select the laser displacement sensor most suitable for the application to a non-contact R-test. A prototype non-contact R-test device is developed for the verification of the proposed algorithm for non-contact R-test. Experimental case studies of error calibration of (1) static and (2) dynamic error motions of rotary axes in a five-axis machine tool with the developed non-contact R-test prototype are presented. Its measurement performance is compared to the conventional contact-type R-test device. (c) 2012 Elsevier Inc. All rights reserved.