High-Speed Roll-to-Roll Hot Embossing of Micrometer and Sub Micrometer Structures Using Seamless Direct Laser Interference Patterning Treated Sleeves
High-Speed Roll-to-Roll Hot Embossing of Micrometer and Sub Micrometer Structures Using Seamless Direct Laser Interference Patterning Treated Sleeves
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DOI：
10.1002/adem.201700201
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发表时间：
2017-11-01
影响因子：
3.6
通讯作者：
Lasagni, Andres Fabian
中科院分区：
文献类型：
--
作者：
Rank, Andreas;Lang, Valentin;Lasagni, Andres Fabian
在这项研究中，我们提出了一个无缝的高速辊对辊热压工艺使用直接激光干涉图案镍套筒作为模具。空间周期分别为5.0、3.9和1.5 μ m，结构高度分别为572、325和141 nm的线状图案用于压印PET箔。研究了网速度对模腔填充的影响，从而对所制造的图案的结构高度和均匀性的影响。卷筒纸速度在2和50 mmin（-1）之间变化。对于5.0和3.9m的周期，结构高度随着腹板速度的降低而发生，而对于1.5m的周期，结构高度在测试间隔内保持不变。还观察到均匀性随着幅材速度的增加而降低。最后，基于Navier-Stokes方程和赫兹接触压力的分析模型被用来解释实验结果。实验数据与理论计算值吻合较好。
In this study, we present a seamless high-speed roll-to-roll hot embossing process using a direct laser interference patterned nickel sleeve as a mold. Line-like patterns with spatial periods of 5.0, 3.9, and 1.5m and structure heights of 572, 325, and 141nm, respectively are used for imprinting PET-foils. The influence of the web speed on the cavity filling and consequently on the structure height and homogeneity of the fabricated patterns is studied. The web speed is varied between 2 and 50mmin(-1). For the 5.0 and 3.9m periods, a decrease in structure height with the web speed occurs, while for the 1.5m period the structure height remains constant in the tested interval. Also a decrease in homogeneity is observed with increasing web speed. Finally, an analytical model, based on the Navier-Stokes equation and Hertzian contact pressure, is used to explain the experimental results. The experimental data are in good agreement with the calculated theoretical values.