Reduction of the Probe Diameter through the Correction of Spherical Aberration by the Foil Lens
Reduction of the Probe Diameter through the Correction of Spherical Aberration by the Foil Lens
复制标题
通过箔透镜校正球面像差来减小探头直径
DOI：
10.1093/oxfordjournals.jmicro.a050471
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发表时间：
1984
期刊：
影响因子：
--
通讯作者：
S. Maruse
中科院分区：
文献类型：
--
作者：
T. Hanai;M. Hibino;S. Maruse
研究了用箔透镜校正球差对电子探针直径的影响。由薄板的锐边的STEM图像测量形成有箔透镜的探针的直径，并且发现对于50和26 mrad的探针会聚半角，探针的直径分别减小5倍和2倍。为了定量评价实验结果，进行了涉及第三和第五阶球面像差的探针直径的计算。除了在最佳箔透镜电压附近发生的差异外，测量的和计算的探针直径之间有很好的一致性。还研究了箔透镜对STEM图像的影响，并且在43 mrad的大会聚角下证实了图像质量的改善。
The effect of the correction of spherical aberration by means of the foil lens on the electron probe diameter was investigated. The diameter of the probe formed with the foil lens was measured from STEM images of sharp edges of thin plates and was found to be reduced by factors of 5 and 2 for the convergence semi-angles of the probe of 50 and 26 mrad, respectively. For a quantitative evaluation of the experimental results, calculations of the probe diameter involving the third- and fifth-order spherical aberrations were done. There was a good agreement between the measured and calculated probe diameters except for the discrepancy which occurs near the optimum foil lens voltage. The effect of the foil lens on the STEM image was also studied and the improvement of the image quality was confirmed at the large convergence angle of 43 mrad.