Room-temperature preparation of β-FeSi2 microprecipitates by the KrF excimer laser ablation of an iron disilicide alloy target
Room-temperature preparation of β-FeSi2 microprecipitates by the KrF excimer laser ablation of an iron disilicide alloy target
复制标题
KrF准分子激光烧蚀二硅化铁合金靶材室温制备β-FeSi2微沉淀物
DOI：
10.1063/1.1618019
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发表时间：
2003
影响因子：
4
通讯作者：
H. Niino
中科院分区：
文献类型：
--
作者：
A. Narazaki;Tadatake Sato;Y. Kawaguchi;H. Niino
采用KrF准分子激光烧蚀α-FeSi_2合金靶，在室温下制备了β-FeSi_2微相。空间分辨率为1 μm的拉曼光谱证实，激光烧蚀产生的微米级液滴在室温下以β-FeSi 2晶相沉淀在硅衬底上，而沉积膜的其余部分为非晶。在800 °C氩气气氛中退火6 h后，含有高密度β-FeSi 2沉淀的薄膜在低温（200 K）下表现出1.55 μm的光致发光。
We have fabricated β-FeSi2 microprecipitates at room temperature using KrF excimer laser ablation of an α-FeSi2 alloy target. Raman spectra with a spatial resolution of 1 μm confirmed that the micron-sized droplets generated by laser ablation precipitate as the β-FeSi2 crystalline phase on a silicon substrate maintained at RT, whereas the rest of the deposited film is amorphous. It was also found that films containing a high density of β-FeSi2 precipitates exhibited 1.55 μm photoluminescence at low temperature (up to 200 K) after annealing at 800 °C for 6 h in an argon atmosphere.