Precision manufacturing of fused silica glass by combining bound-abrasive polishing with ultrasonic vibration
Precision manufacturing of fused silica glass by combining bound-abrasive polishing with ultrasonic vibration
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DOI：
10.1117/12.975135
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发表时间：
2012-10
期刊：
影响因子：
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通讯作者：
Yaguo Li;Yongbo Wu;Jian Wang;Qiao Xu;Wei Yang;Yinbiao Guo
中科院分区：
文献类型：
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作者：
Yaguo Li;Yongbo Wu;Jian Wang;Qiao Xu;Wei Yang;Yinbiao Guo
超声波振动辅助加工可以提高加工表面质量和加工效率。因此，我们集成了超声振动（UV）到最近开发的技术化学机械结合磨料抛光，预期进一步提高材料去除率（MRR）和/或表面粗糙度。初步结果表明，超声振动辅助化学机械结合磨料抛光可以导致制造的光学元件的材料去除率增加，同时留下的表面粗糙度与传统的化学机械结合磨料抛光。这主要是由于紫外光辅助化学机械结合磨料抛光在加工过程中产生的切屑排出方面的优越性。
Ultrasonic vibration assisted machining with harder abrasives than the material to be machined can improve the quality of machined surface and manufacturing efficiency. Therefore, we integrated ultrasonic vibration (UV) into a recently developed technique chemo-mechanical bound-abrasive polishing in anticipation of further increasing the material removal rate (MRR) and/or surface roughness. The preliminary results indicate that ultrasonic vibration assisted chemo-mechanical bound-abrasive polishing can lead to increased material removal rate of manufactured optics while leaving the surface roughness comparable to conventional chemo-mechanical bound-abrasive polishing. The great MRR is attributed to the superiority of UV-assisted chemo-mechanical bound-abrasive polishing in discharging resultant swarf during machining.