Gas sensing characteristics of copper phthalocyanine films: effects of film thickness and sensing temperature
Gas sensing characteristics of copper phthalocyanine films: effects of film thickness and sensing temperature
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DOI：
10.1016/j.snb.2003.11.024
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发表时间：
2004-05-01
影响因子：
8.4
通讯作者：
Hsiao, RH
中科院分区：
文献类型：
--
作者：
Lee, YL;Sheu, CY;Hsiao, RH
在金纹玻璃衬底上真空沉积铜酞菁薄膜(CuPc)，用于低温NO2传感。研究了薄膜厚度和传感温度对CuPc薄膜的灵敏度和恢复特性的影响。结果表明，薄膜厚度和传感温度对传感特性均有显著影响。在室温下，50 nm薄膜的恢复特性是令人满意的，并且随着薄膜厚度的增加，恢复特性变差。此外，灵敏度几乎不受薄膜厚度的影响。当传感温度提高到100℃时，较厚的薄膜的回收率可以得到满意的提高，但较薄的薄膜(50、100 nm)的灵敏度却会降低。但是，随着薄膜厚度的增加，灵敏度显著增加，并在200 nm处接近最大值，与25℃时的灵敏度相当，甚至更好。结果表明，减小薄膜厚度和NO2掺杂周期可以改善文献中发现的较差的恢复特性。此外，为了获得更好的传感性能，室温工作时应控制较小的薄膜厚度(50 Nm)，但当工作温度提高到100℃时，需要较高的厚度(200 Nm)。(C)2003爱思唯尔B.V.保留所有权利。
Copper phthalocyanine (CuPc) was vacuum-deposited onto gold patterned glass substrate and used for low temperature operation of NO2 sensing. The effects of film thickness, as well as the sensing temperature, on the sensitivity and recovery characteristics of the CuPc film were investigated. The results show that both film thickness and sensing temperature have significant effect to the sensing characteristics. At room temperature operation, the recovery characteristic is satisfactory for the 50 nm film, and it becomes poor as increasing film thickness. Besides, the sensitivity shows little dependence on the film thickness. When the sensing temperature is elevated to 100degreesC, the recovery ratio of the thicker films can be improved satisfactorily, but the sensitivity of thinner films (50, 100 nm) decrease as a result. However, the sensitivity increases notably with increase of film thickness and approaches the maximum value, which is comparable or even superior to that at 25 degreesC, at about 200 nm. The present results indicate that the poor recovery characteristic found in the literature can be improved by reducing the film thickness and NO2 doping period. Besides, to get superior sensing properties, a small film thickness (50 nm) should be controlled for room temperature operation, but a higher thickness (200 nm) is required when the operation is elevated up to 100 degreesC. (C) 2003 Elsevier B.V. All rights reserved.